Компания Ebara поставила первый чиллер с температурой минус 60 градусов для полупроводниковой промышленности

Ebara ships RJ-TTC minus-60C chiller for semiconductor etching KEY POINTS - Ebara ships first RJ-TTC ultra-low-temperature chiller for semiconductor applications - Minus-60C model cuts power and water consumption by about 30% to 50% versus previous Ebara products - Compact pump and real-time control algorithm target rising cooling demands in semiconductor etching Ebara Corp has developed an ultra-low-temperature chiller that can cool to minus 60 degrees Celsius for semiconductor applications and has made its first shipment, the company said on August 13. The product, called the RJ-TTC model, reduces power and water consumption by about 30% to 50% compared with Ebara's previous products. The company developed it by combining refrigeration and pump technologies to address rising energy and water use in chipmaking equipment. Ebara said requirements in semiconductor etching have become more demanding as devices are miniaturized and more highly integrated, increasing the need for precision, lower temperatures and higher output. That has raised the load on chillers used to cool etching equipment. The RJ-TTC model includes a compact energy-saving pump developed for cooling-liquid circulation and a proprietary algorithm that optimizes chiller control in real time according to operating load. Chillers are used in semiconductor manufacturing to maintain stable temperatures for process tools. In advanced etching, tighter thermal control can support process accuracy as chip structures become smaller and more complex. Ebara said demand for ultra-low-temperature chillers is expected to increase further as semiconductor devices continue to become more finely patterned and highly integrated. © Copyright 2026 IBTimes JP. All rights reserved.